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Used Etching Systems in Gyeonggi-do, South Korea

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    Novellus AURA 2000

    • Manufacturer: Lam Research - Novellus

    ASHER ETCH, CU Wafer size: 200mm

    Yongin-si, South Korea
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    FSI EXC 2000

    • Manufacturer: FSI

    HF vapor etch Wafer size: 8"

    Yongin-si, South Korea
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    UNAXIS Nextral 860L

    • Manufacturer: Unaxis

    ECR etching sstem for III/V

    Yongin-si, South Korea
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    LAM Rainbow 4428

    • Manufacturer: Lam Research - Novellus
    • Model: RAINBOW 4428

    Lam Rainbow 4420 / Back Nitride Etch

    Yongin-si, South Korea
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    1996 LAM TCP9408SE

    • Manufacturer: Lam Research - Novellus

    1 System Wafer size: 200mm

    Yongin-si, South Korea
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    TEL Unity ME 85555SSSS

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system * 3 Process chambers

    Yongin-si, South Korea
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    TEPLA Technics Auto 300

    • Manufacturer: TePla

    Photoresist Stripper/Asher/Etcher System

    Yongin-si, South Korea
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    TEL Unity II 85 TPA

    • Manufacturer: Tokyo Electron - TEL

    Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...

    Yongin-si, South Korea
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    TEL TE-8500S

    • Manufacturer: Tokyo Electron - TEL
    • Model: TE-8500S

    Oxide_Etch

    Yongin-si, South Korea
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    1996 Mattson Aspen II

    • Manufacturer: Mattson

    Asher, 1CH(Non-ICP) Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT IPS

    • Manufacturer: Amat

    Generator Rack / Chamber

    Yongin-si, South Korea
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    1998 Shibaura CDE-80HN

    • Manufacturer: Shibaura

    Poly, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    TEL UNITY IIe655DD

    • Manufacturer: Tokyo Electron - TEL

    Oxide, DRM(2CH) Wafer size: 150mm

    Yongin-si, South Korea
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    TEL UNITY Me SCCM

    • Manufacturer: Tokyo Electron - TEL

    Oxide,SCCM(3CH) Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 4528

    • Manufacturer: Lam Research - Novellus

    PASSIVATION ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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