Building Filters
 - 1995 TEL UNITY85DM[SiO2 ZL]- Manufacturer: Tokyo Electron - TEL
 Yongin-si, South Korea
 - Canon MAS-8220- Manufacturer: Canon
- Model: MAS-8220
 Yongin-si, South Korea
 - 2005 Hitachi High-Technologies M-632A- Manufacturer: Hitachi
 Yongin-si, South Korea
 - 1997 Hitachi High-Technologies M-632A- Manufacturer: Hitachi
 Yongin-si, South Korea
 - 1995 TOK TCE3822- Manufacturer: TOK
 Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 - ULTIMA3 ASHER- Manufacturer: ULTIMA3
 Yongin-si, South Korea
 - AXCELIS/FUSION 200ACU- Manufacturer: Axcelis
 Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 - Tokyo Electron Ltd. Telius 305 SCCM- Manufacturer: Tokyo Electron - TEL
- Model: TELIUS 305 SCCM
 - Wafer size: 12" Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
