Building Filters
 - 1996 TEL UNITY85DP- Manufacturer: Tokyo Electron - TEL
 Yongin-si, South Korea
 - Shibaura CDE-80- Manufacturer: Shibaura
- Model: CDE-80
 Yongin-si, South Korea
 - 1996 TEL UNITY85DP- Manufacturer: Tokyo Electron - TEL
 Yongin-si, South Korea
 - Canon MAS-8220- Manufacturer: Canon
- Model: MAS-8220
 Yongin-si, South Korea
 - Canon MAS-8220- Manufacturer: Canon
- Model: MAS-8220
 Yongin-si, South Korea
 - Canon MAS-8220- Manufacturer: Canon
- Model: MAS-8220
 Yongin-si, South Korea
 - 2006 Hitachi High-Technologies M-531A- Manufacturer: Hitachi
 Yongin-si, South Korea
 - 1995 TOK TCA-3822- Manufacturer: TOK
 Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 - HiEtch ICP Etcher BMR- Manufacturer: HiEtch ICP Etcher
 Yongin-si, South Korea
 - GAMMA ASHER- Manufacturer: GAMMA
 Yongin-si, South Korea
 - GAMMA ASHER- Manufacturer: GAMMA
 Yongin-si, South Korea
 - GAMMA/2100 ASHER- Manufacturer: GAMMA/2100
 Yongin-si, South Korea
