Used etch/ash/clean plasma processing

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT 4.0 • System software (App): 5.6/3.4 • Cassette Interface: o (2) ...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 2000 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 4.11 • Cassette Interface: o (2) 200mm ...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win2K • System software (App): 5.9.2 • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

Process Asher Strip Software Version 4.2.0.12 System Power Rating 208AC, 3 Phase Loading Configuration 2 chambers & 2 Loadposts Chm Position 1 Bulk strip N2, O2, H2N2 Chm Position 2 Bulk strip N2, O2, H2N2

StripperAsher

• Manufacturer: Unknown

StripperAsher

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M981510 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M983110 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• Manufacturer: Unknown

System is currently idle in the Fab.

StripperAsher

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M980830 • Currently Configured for 200mm Wafer Sizes • MFG Date: TBD • Install Type: Through-the-Wall (TTW) • System Software : ...

StripperAsher

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M981150 • Currently Configured for 200mm Wafer Sizes • MFG Date: TBD • Install Type: Through-the-Wall (TTW) • System Software : ...

StripperAsher

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Mar 1998 • Last PM Date: Nov 2008 • Install Type: Stand Alone • Application: Photoresist Removal • System Model: PEP-4800DL • Cassette Interface: o SMIF Re...

StripperAsher

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: 1995 • Last PM Date: Oct 2, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: V3.71 • Cassette Interface: o (2) Asyst...

StripperAsher

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Jul 1997 • Last PM Date: Sep 16, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Cassette Interface: o (2) ...