StripperAsher in Bree, Wexford, Ireland

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M981150 • Currently Configured for 200mm Wafer Sizes • MFG Date: TBD • Install Type: Through-the-Wall (TTW) • System Software : ver 4.00 • Main Section: o Product: Originally PEP3510C (H) o Note: Tool was converted to Dual PEP3510A o Config: 95-0526 o Status Lamp (RYG), Event Programmable through System SW o SECS / GEM Interface o Cassette Interface: (2) Open Cassette ?? 25 & 26-Slot Wafer Cassette Handling o Wafer Handler: Dual Blade Yaskawa Robot o Left/Right Coolers • Left Module: o Model: PEP3510A (L) o Config: 97-3250 o SN: M982560.1.2 o Source/Process Kit Type: Quartz o Platen Type: Standard o MKS 600 Series Pressure Controller o IBM Computer/Controller o Power Supplies: ?? MWave PS: Astex (2000W) • Right Module: o Model: Originally PEP3510C (R), re-configured to PEP3510A (R) o Config: 95-0482 o SN: M981150 o Source/Process Kit Type: Quartz o Platen Type: Standard