Used etch/ash/clean plasma processing

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 5.6 • Cassette Interface: o (2) 200mm (...

StripperAsher

• used

• Manufacturer: Unknown

StripperAsher

• used

• Manufacturer: Unknown

Tool was de-installed on October 1st, 2014. Tool is stored in a storage room in Fab 15. Confirmed with Fab 15 tool is missing parts as of Feb 12th, 2015 and there is no modification record as of January 22nd, 201...

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M923300 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M981770 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M981510 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M983110 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

System is currently idle in the Fab.

200mm Semiconductor Front and Back end Equipment

• used

• Manufacturer: Lam Research - Novellus

Tool ID OEM Model Wfr Size Configuration Process Vintage Tool Location Tool Status CSISEMI-1 LAM TERES 8" 2 belt: L,R, 4 head CMP Oxide Apr-01 Clean Room Running CSISEMI-2 LAM TERES 8" 2 belt: L,R, 4 head CMP Oxi...

1996 Gasonics L3510

• used

• Manufacturer: GaSonics
• Model: L3510

GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...

2003 Matrix Integrated Systems Bobcat 208

• used

• Manufacturer: Bobcat

Bobcat 208 Stripper/Asher Etch/Ash/Clean - Plasma Processing Date of Manufacture: 2003-05-30 Currently Configured for: 200mm Loading Configuration Open Cassette Software Version 1.8.7.0.06 Is System On-Line?...

2007 Axcelis Technologies Inc. RapidStrip 210ES

• used

• Manufacturer: Axcelis

Stripper/Asher Etch/Ash/Clean - Plasma Processing Date of Manufacture: 2007-12-31 Currently Configured for: 200mm Part Number 1080-6037 Original Ship Date from OEM 2007 Software Version 1.8.7.0.06 Is Syste...

2015 LAM 2300e5 Exelan Flex FX

• used

• Manufacturer: Lam Research - Novellus
• Model: 2300E5 EXELAN FLEX FX

-Dielectric Etch -Etch/Ash/Clean - Plasma Processing Equipment details: Date of Manufacture: 2015 Currently Configured for: 300mm Current Equipment Status: Installed in line Asset HDD not included Tool con...