Used Surface Treatment / Cleaning

Shibaura CDE8 Etch

• Manufacturer: Shibaura

Shibaura CDE8

Bevel Etch

• Manufacturer: Unknown

Tool is stored in a storage room as of March 25th, 2015. Confirmed with Fab 15 there is no missing part and is one damaged part, and no modification record. [Chamber A] Chamber type:Bevel Gas config. (sccm)=MFC f...

Tegal 981 Etcher 8 inch

• Manufacturer: Tegal
• Model: 981

Equipment Make: Tegal Equipment Model: 981 Type: Etcher Wafer Size: 8" Equipment Configuration: Single chamber silicon nitride

TEL Trias Ru Linear Barrier CVD 300mm

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

NSC ES371

• Manufacturer: NSC

etcher

AMAT 8330 Metal Etcher

• Manufacturer: Amat

Wafer size: 6.0

ULVAC NE-550 200mm

• Manufacturer: Ulvac

ULVAC NE-550 200mm

TEL TE8500 200mm

• Manufacturer: Tokyo Electron - TEL
• Model: TE8500

TEL TE8500 200mm

TEL Telius Sp Oxide Etch

• Manufacturer: Tokyo Electron - TEL

3xTelius SP Vesta Chambers

Gasonics Strata

• Manufacturer: GaSonics
• Model: STRATA

Gasonics Pep Iridia

• Manufacturer: GaSonics
• Model: PEP IRIDIA

2xChambers Poly Etch

TOK OPM-A1250 Asher

• Manufacturer: TOK

150MM

Dielectric Etch Telius SP-305 SCCM

Make: Tokyo Electron Ltd.

Dielectric Etch Telius SP 305 DRM

• Manufacturer: Tokyo Electron - TEL
• Model: TELIUS SP 305 DRM

Make: Tokyo Electron Ltd.

Tegal 915 Model 915 Asher

• Manufacturer: Tegal

4-5" wafer asher, SST construction, missing generator