Used Surface Treatment / Cleaning

Montair Wafer etch

• Manufacturer: Montair

General

Mattson Helios 6000 Rapid Thermal,

• Manufacturer: Mattson

RTP

LTK 200 Photomask

• Manufacturer: LTK

PR Stripper

Rudolph AutoEL Ellipsometer

• Manufacturer: Rudolph

Rudolph AutoEL Ellipsometer

AMAT CHAMBER

• Manufacturer: Amat
• Model: CHAMBER

Mxp+ chamber, Oxide, ESC, gateV/V for Centura Frame

STS MULTIPLEX

• Manufacturer: STS

Deep Si Etch

JST Stainless Steel Wet Bench Au

• Manufacturer: JST

JST Stainless Steel Wet Bench Au

Tokyo Electron Ltd. Metal CVD (Chemical Vapor Deposition) Trias Ti/TiN

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

model number:Trias Ti/TiN

DRYTEK 384T Plasma Metal Etcher

• Manufacturer: DRYTEK

Plasma Metal Etcher

BRANSON/IPC Series 4000 Plasma Barrel Stripper

• Manufacturer: Branson
• Model: SERIES 4000

Plasma Barrel Stripper, 10" X 20" Quartz Chamber, S4075-11020 Reactor Center

VG 4 Bath Wet Bench

• Manufacturer: VG

4 bath engineering wet bench with 4 rinse stations

StripperAsher

• Manufacturer: Unknown

StripperAsher

• Manufacturer: Unknown

System de-installed on 23-May-14. System still located at its Fab location. Process: Etch-Ashing Wafer Handling Configuration -Full batch/ single wafer: Single wafer -Robot: Yaskawa robot -Robot blade: Dual blade...

Dielectric Etch

• Manufacturer: Unknown

Tool is stored in a storage room as of March 25th, 2015. [Chamber A] Chamber type:SCCM Jin Gas config. (sccm)=FCS full scale 2line(advanced radical distribution control) Ar(1776)/C4F6(50.3)/C4F8(43)/CF4(336) O2(6...

StripperAsher

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M981510 Please see actual DS for full config details (linked) Backing Pumps are not included with this system