KLA-Tencor AIT I (8020)
- Manufacturer: KLA-Tencor
- Model: AIT I
A double darkfield patterned wafer inspection tool. Features: Automated wafer inspection system Double-dark field (DDF) laser scanning technology High detection sensitivity even for difficult after-etch, develop,...
San Jose, CA
KLA-Tencor AIT I In-Line Defect Inspection System
- Manufacturer: KLA-Tencor
- Model: AIT I
Automated full water inspection system for detecting particles as small as 0.10 micrometers on bare silicon and patterned process wafers Features: High detection sensitivity even for difficult after-etch, develop...
San Jose, CA
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