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Used Hitachi Defect Inspection

  • Hitachi S-3400N Scanning Electron Microscope

    Hitachi S-3400N Scanning Electron Microscope

    • Manufacturer: Hitachi
    • Model: S-3400N

    Hitachi S-3400N Scanning Electron Microscope , used. the unit came oit working lab. The unit. Inlcuded few software and mnuals( please check the pictures). Pump, computers and other cables are not included. ◙ Uni...

    $14,500 USD

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    Est. $285/mo

    Baltimore, MD
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    Hitachi S 4500 Scanning Electron

    Hitachi S 4500 Scanning Electron Microscope (SEM)

    • Manufacturer: Hitachi
    • Model: S-4500

    United States
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    HITACHI SU-70

    HITACHI SU-70

    • Manufacturer: Hitachi
    • Model: SU70

    Hitachi SU-70, Ultra-high resolution analytical Scanning Electron Microscope SEM Model SU-70 is a new-concept SEM, incorporating Hitachi’s field proven semi-in-lens technology for ultra-high resolution with a Sc...

    United States
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    Hitachi S-5500

    Hitachi S-5500

    • Manufacturer: Hitachi
    • Model: S-5500

    Process Type: FA SEMs/TEMs/Dual Beams Specifications: Secondary Electron image resolution: 0.4nm at 30kV and 1.6nm at 1kV Specimen Stage Stage Traverse: X: +3.5mm, Y: +2.0mm, Z:+0.3mm, T: +40 degrees Sample ...

    United States
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    1998 Hitachi S 5200

    1998 Hitachi S 5200

    • Manufacturer: Hitachi
    • Model: S-5200

    Hitachi S 5000 Field Emission Scanning Electron Microscope (SEM) Working condition. - Ultra high resolution 1998 Vintage

    United States
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    2012 HITACHI SU-8040

    2012 HITACHI SU-8040

    • Manufacturer: Hitachi
    • Model: SU8040

    Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,0...

    United States
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    2012 HITACHI SU-8040

    2012 HITACHI SU-8040

    • Manufacturer: Hitachi
    • Model: SU8040

    Vintage: 2012 Process Type: FA SEMs/TEMs/Dual Beams Equipment Information: Status of Equipment: Refurbished Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, De...

    United States
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    Hitachi S-4800-II

    Hitachi S-4800-II

    • Manufacturer: Hitachi
    • Model: S-4800

    Vintage: 2004/2007 Process Type: FA SEMs/TEMs/Dual Beams Status of Equipment: Refurbished Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2...

    United States
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    Hitachi S-4700-II

    Hitachi S-4700-II

    • Manufacturer: Hitachi
    • Model: S-4700

    Process Type: FA SEMs/TEMs/Dual Beams Wafer Size: N/A Status of Equipment: Refurbished Configuration Type II stage with 5 axis motorization Type I load lock, 4 inch (optional 6 inch) Full control pad CD Me...

    United States
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    2008 Hitachi SU-70

    2008 Hitachi SU-70

    • Manufacturer: Hitachi
    • Model: SU70

    Process Type: FA SEMs/TEMs/Dual Beams Wafer Size: N//A Date of Manufacture: 2008 Equipment Information: Status of Equipment: Refurbished Resolution Imaging; 1 nm/15 kV, 1.6 nm/1 kV In-lens SE and BSE Signal...

    United States
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    1995 Hitachi S 4500

    1995 Hitachi S 4500

    • Manufacturer: Hitachi
    • Model: S-4500

    Type: Field Emission Scanning Electron Microscope (FE-SEM)

    United States
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    1994 Hitachi S 4500 SEM

    1994 Hitachi S 4500 SEM

    • Manufacturer: Hitachi
    • Model: S-4500

    United States
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    Hitachi S-4700-I w/EDX

    Hitachi S-4700-I w/EDX

    • Manufacturer: Hitachi
    • Model: S-4700

    Status of Equipment: Crated Specification: Secondary electron image resolution: 2.1nm at 1kV 1.5nm at 15kV and WD = 12mm or X-ray analysis position Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X...

    United States
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    HITACHI SU8040 Scanning Electron Microscope

    HITACHI SU8040 Scanning Electron Microscope

    • Manufacturer: Hitachi
    • Model: SU8040

    Hitachi SU8040 Scanning Electron Microscope, is a high-quality SEM used in various industries, research, and educational settings for imaging and analyzing the surface of specimens at high resolution. Nanotechno...

    United States
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    Hitachi S 4700 Scanning Electron

    Hitachi S 4700 Scanning Electron Microscope

    • Manufacturer: Hitachi
    • Model: S-4700

    SEM

    United States
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Overview

Defect inspection in semiconductor metrology covers systems and processes used to detect, classify, and quantify defects on wafers, masks, and packaged devices. These tools—optical, e-beam, or surface-scatter based—measure defect size, density and location to improve yield and root-cause analysis. Equipment must meet cleanroom, vibration and ESD requirements and often integrates advanced imaging, classification software, and data analytics for production monitoring and process control.

FAQ

What should I check when buying a used defect inspection system?

Verify detector and optics condition, resolution and sensitivity specs, compatible wafer sizes, software/firmware versions, maintenance and calibration history, availability of spare parts and service contracts, and any upgrades needed for your process node.

How should a defect inspection tool be shipped to protect it?

Use climate-controlled, vibration-damped transport with custom crating, secure ESD protection, and shock monitors. Coordinate disassembly and reassembly with the vendor or certified service team and insure the shipment for high-value equipment.

What maintenance and calibration routines are required?

Perform daily optics and cleanliness checks, monitor vacuum/pumps if applicable, and run regular software backups. Schedule annual OEM or qualified-lab calibration, replace consumables per manufacturer intervals, and keep service records to ensure traceable performance.