Used controller in Gyeonggi-do, South Korea

Semitool 870S SRD

• Manufacturer: Semitool
• Model: SRD-870S

6"/150mm Wafer Capable, PSC-102 Controllers, Single Bolt Rotor Design

KLA Tencor 8100XP/8100XPR

• Manufacturer: KLA-Tencor

Win NT controller, 30nm feature size, 4.0nm res, 4"-8", 50wfs/hr

KLA Tencor 8250/8300/8450

• Manufacturer: KLA-Tencor

Win NT controller, 30nm feature size, 4.0nm res, 4"-8", 55wfs/hr

AMAT Centura 5200 RTP

• Manufacturer: Amat
• Model: Centura

Narrow Body Loadlock Chamber / RTP XE Chamber * 2 / HP+ Robot / System Controller / AC Power Box

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical LP-CVD System NIT Furnace / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical AP System ALPHA-8S ( N2 L/L ) / CAP OX ( TEOS) / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical AP-System Trans-LC , non N2 load lock / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

AMAT Centura 5200

• Manufacturer: Amat
• Model: Centura

WxZ process Narrow Body Loadlock / WxZ process Chamber 4 / MS Cooldown / HP Robot / System Controller/AC Power Box / RF Generator Rack (2MT501)

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical AP System ALPHA-8S Alloy Furnace / Main System / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

TEL Alpha 8SE

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8SE

Vertical LP-CVD System ALPHA-8SE N2 L/L Poly Furnace / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

AMAT CENTURA 5200

• Manufacturer: Amat
• Model: Centura

Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack

AMAT Centura 5200

• Manufacturer: Amat
• Model: Centura

Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack

TEL Mark 8

• Manufacturer: Tokyo Electron - TEL
• Model: MARK 8

CLEAN TRACK MARK 8 CARRIER STATION 1 X 4 SIDE LOADING / UPS APPLICABLE FOR AC POWER BOX UPGRADE / PROCESS STATION BLOCK * 2 / CAR APPLICABLE SYSTEM CLOSED ENVIRONMENT / SOLVENT SUPPLY SYSTEM FOR COT UNIT / P.RESI...

TEL Unity II 85 TPA

• Manufacturer: Tokyo Electron - TEL

Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...

Unicon Series

The uni-body Breaker (GBP-Series) GBP 10 GBP 20 GBP 30 GBP 35 GBP 40 GBP 43 Specification Construction and Main Parts Cover Bolt The Cover and the Case of the main body are tightly fixed with Cover bolts. ...