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TEL Unity II 85 TPA
- Manufacturer: Tokyo Electron - TEL
Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...
Yongin-si, South Korea
GASONICS GASONIC L3510
- Manufacturer: GaSonics
GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...
Gyeonggi-do, South Korea
Wintel Poly Etcher
- Manufacturer: Wintel
LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Application : DPT, QPT, Hard mask etch etc. Excellent Uniformity ＜1% (Concentric profile) Improved wafer edge uniformity : Wide plasma generati...
Gyeonggi-do, South Korea