Used etcher

Lam Research TCP 9600 SE Etcher

• Manufacturer: Lam Research - Novellus
• Model: TCP 9600SE

Condition: fully refurbished to OEM Specs. 1. Model : TCP9600SE with DSQ & APM 2. System Serial Number : 3. Operator Interface : bulkhead 4. Software : Envision 5. Transportation Wafer Size : 200mm Wafers ( ...

Lam Research 853-013610-001 Solenoid Tray Assembly 4420 Etcher Working Surplus

• Manufacturer: Lam Research - Novellus

Lam Research 853-013610-001 Solenoid Tray Assembly 4420 Etcher Working Surplus This Lam Research 853-013610-001 is working surplus. The physical condition is good, but there are signs of previous use and handling...

Lam Research 490 Polyimide plasma etcher

• Manufacturer: Lam Research - Novellus

Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

Hitachi 200mm Wafer Transfer Robot with End Effector M-712E Etcher Working

• Manufacturer: Hitachi
• Model: M-712E

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi 200mm Wafer Transfer Robot with End Effector M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Made in Japan Thi...

2018 STS / SPTS Versalis fxP Etcher

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...

PLASMA-THERM 790 Reactive Ion Etcher

• Manufacturer: Plasma-Therm
• Model: 790

- Manually Loaded Process Chamber with 8” (dia.) Cathode - Gas Distribution Panel with 4ea Gas Channels - MKS 1479 Metal Sealed Mass Flow Controllers - 4ea Additional Gas Channels Available - RFPP RF5S RF Generat...

Lam Research 4420 200mm Baffle Plate Cover Lot of 3 Rainbow Etcher Working

• Manufacturer: Lam Research - Novellus

“Removed from a Lam Research 4420 Rainbow Plasma Etcher System” Lam Research 4420 200mm Baffle Plate Cover Lot of 3 Rainbow Etcher Working Inventory # CONV-187 Reseller Lot of 3 Removed from a Lam Research 4420 R...

2005 STS ICP PRO HRM Etcher

• Manufacturer: STS

150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...

Hitachi EC1 Transformer Unit Etch Chamber M-712E Trench Etcher Working Surplus

• Manufacturer: Hitachi
• Model: M-712E

“The front removable mounting brackets are slightly bent and the face is scuffed (see photos).” Hitachi EC1 Transformer Unit Etch Chamber M-712E Trench Etcher Working Surplus Inventory # A-19270, AA-1413 Removed ...

2000 LAM Alliance 6 9400 PTX Etcher

• Manufacturer: Lam Research - Novellus

- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...

Hitachi UNIT1 DC Power Supply M-712E Etcher System Damaged Case Untested As-Is

• Manufacturer: Hitachi
• Model: M-712E

“The unit has damage to the left front panel. has scuffs to the body, and an internal power supply shows as bad (see photos).” Hitachi UNIT1 DC Power Supply M-712E Etcher System Damaged Case Untested As-Is Sold A...

Oxford PlasmaPro NGP1000 ICP 380

• Manufacturer: Oxford
• Model: PlasmaPro NGP1000

OXFORD PLASMAPRO NGP1000 ICP 380 ETCHER consisting of: - Model: Oxford PlasmaPro NGP1000 ICP380 ETCHER- Load Locked Chamber - 490mm Diameter Aluminum Lower Electrode- Capable of running up 450mm wafers- System P...

Oxford Plasmalab 100 ICP System

• Manufacturer: Oxford
• Model: PlasmaLab 100

OXFORD PLASMALAB 100 ICP ETCHER consisting of:- Model: Plasmalab 100 ICP- Inductive Coupled Plasma Source (ICP380)- Max wafer size: 8"/200m diameter (8" platen)- X-20 PLC Controller- New Windows 10 PC- Cryo Table...

Tracer Lab Low Temperature Asher, Model LTA 600

Oxford Plasmalab 100 ICP-RIE 180

• Manufacturer: Oxford
• Model: PlasmaLab 100

OXFORD PLASMALAB 100 ICP ETCHER consisting of:- Manufacturer: Oxford Instruments- Model: Plasmalab System 100 ICP-RIE 180- Process gases used: H2, O2, N2, Ar, CF4, SF6, CHF3, He, CH4, HBr, Cl2 and BCl3- Cryo Tabl...