Used Mass Flow Controllers

Tylan FC-260

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FM-861

Gas: O2 Flow rate: 20 SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

• Manufacturer: Horiba

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

• Manufacturer: Horiba

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

• Manufacturer: Horiba

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Flow rate 20 SCCM Gas Ar Device name: Mass flow controller

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

• Manufacturer: Horiba
• Model: SEC-4400M

Gas:HBr Flow rate:100SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:1LM Device name: Mass flow controller (MFC)