2002 KEK DJ-1223V
used
- Manufacturer: KEK
Model no: KOKUSAI DJ-1223V | Wafer size: 300mm | Process: Si3N4 (N2,DCS,NH3) | Controller: CX3002C | Power: 3P 208V
Chungcheongbuk-do, South Korea2001 Hitachi Kokusai DJ-1223V
used
- Manufacturer: Hitachi
Model no: KOKUSAI DJ-1223V | Wafer size: 300mm | Process: Si3N4 (N2,DCS,NH3) | Controller: CX3010 | Power: 3P 208V
Chungcheongbuk-do, South Korea