Tokyo, Japan
Horiba Stec Stec SEC-4400MC-UC
Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan

