Used Unknown Surface Treatment / Cleaning

Glen Technology Plasma Cleaning System

• used

• Manufacturer: Unknown

Glen Technology Plasma Cleaning System Plasma Cleaning System

Surface Tech Sys MXP Multiplex ICP HR

• used

• Manufacturer: Unknown

Surface Tech Sys MXP Multiplex ICP HR SURFACE TECHNOLOGY SYSTEMS MXP ICP HR Chlorine Etcher – Year 2003

POLYFLOW S-620 OMNI CLEAN 200

• used

• Manufacturer: Unknown

POLYFLOW S-620 OMNI CLEAN 200 WET PROCESS

STEAGAWP PR strip post ash clean

• used

• Manufacturer: Unknown

STEAG/AWP PR strip /post ash clean Multistep processes SPM, DHF (FEOL) – Parts Sourcing Vintage 1,996

Maruwa PCS-2100S-OC 200mm Cleaning Machine

• used

• Manufacturer: Unknown

Maruwa PCS-2100S-OC 200mm Cleaning Machine

Maruwa PCS-1700-0C 200mm Cleaning Machine

• used

• Manufacturer: Unknown

Maruwa PCS-1700-0C 200mm Cleaning Machine

Maruwa HF1-200-3FV-1C 200mm Cleaning Machine

• used

• Manufacturer: Unknown

Maruwa HF1-200-3FV-1C 200mm Cleaning Machine

Maruwa HF1-200-3FV-1C 200mm Cleaning Machine

• used

• Manufacturer: Unknown

Maruwa HF1-200-3FV-1C 200mm Cleaning Machine

Maruwa AQW-200-1FV-0C 200mm Wet Tube Cleaning Machine

• used

• Manufacturer: Unknown

Maruwa AQW-200-1FV-0C 200mm Wet Tube Cleaning Machine

Maruwa AQW-200-1FV-0C 200mm Wet Tube Cleaning Machine

• used

• Manufacturer: Unknown

Maruwa AQW-200-1FV-0C 200mm Wet Tube Cleaning Machine

StripperAsher

• used

• Manufacturer: Unknown

StripperAsher

• used

• Manufacturer: Unknown

Tool was de-installed on October 1st, 2014. Tool is stored in a storage room in Fab 15. Confirmed with Fab 15 tool is missing parts as of Feb 12th, 2015 and there is no modification record as of January 22nd, 201...

StripperAsher

• used

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Jan 1997 • CE Marked • Last PM Date: Nov 5, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: V3.71 • Cassette Interf...

StripperAsher

• used

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Dec 1996 • Last PM Date: Nov 13, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Cassette Interface: o (2) ...

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M923300 Please see actual DS for full config details (linked) Backing Pumps are not included with this system