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Used robotics

  • Trusted Seller
    Ulvac Enviro Downstream Microwave Asher

    Ulvac Enviro Downstream Microwave Asher

    • Manufacturer: Ulvac
    • Model: Enviro

    Ulvac Enviro Downstream Microwave Asher consisting of:- Single Chamber Advanced Strip System - Currently Configured for 6" Wafers - Computer- ENI OEM-6B RF Generator- 5 MFCs- Brooks Robot- Edwards IQ Pump/Blower-...

    Decatur, GA
  • Trusted Seller
    Ulvac Enviro Downstream Microwave Asher

    Ulvac Enviro Downstream Microwave Asher

    • Manufacturer: Ulvac
    • Model: Enviro

    - Single Chamber Advanced Strip System - Computer - ENI OEM-6B RF Generator - 5 MFCs - Brooks Robot - Edwards IQ Pump/Blower - Manuals

    United States
  • Trusted Seller
    2000 ULVAC Enviro 1 150mm

    2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

    • Manufacturer: Ulvac
    • Model: Enviro

    - Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...

    United States
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China