- Trusted Seller
Mattson Aspen III, Front End Transfer Chamber, Robot, Controller
- Manufacturer: Mattson
Used, parts, Transfer module 12" wafer
United States - Trusted Seller
1993 Gasonics L 3200 Asher, 4", 6"
- Manufacturer: GaSonics
- 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roughing pumps and pressure control systems (throttle valves) - Electronics control system - Automated robotic wafer ...
United States - Trusted Seller
2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
- Manufacturer: Ulvac
- Model: Enviro
- Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...
United States - Trusted Seller
GASONICS 99-0339 Aura A2000LL Plasma Asher Stripper Novellus A95-205-01 Spare
- Manufacturer: GaSonics
- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked - Sold As-Is Installed Components - Load Lock Chamber Part No: A95-205-01, 56-7923 - Asyst Technologies Index...
United States - Trusted Seller
1999 Mattson Aspen II ICP
- Manufacturer: Mattson
Main frame. Cables 64*76*78 AC power rack 26*18*66 Utility box 25*20*75 RF rack 22*26*55 Chiller. Cables 33*25*55 Transformer 24*24*30 Parts box-1 : spare parts, Tool Manual 28*20*16 Parts box-2 : spare pa...
United States - Trusted Seller
Novellus 99-0339 Aura A2000LL Plasma Asher Stripper GaSonics Non-Copper Surplus
- Manufacturer: Lam Research - Novellus
- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked Installed Components - Load Lock Chamber Part No: A01-218-01 - Asyst Technologies Indexer Elevator Part No: 0...
United States - Trusted Seller
GASONICS 99-0339 Plasma Asher Stripper Aura A2000LL Novellus A95-053-02 As-Is
- Manufacturer: GaSonics
- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked - Sold As-Is Installed Components - Load Lock Chamber Part No: A95-053-02 - Asyst Technologies Indexer Elevat...
United States 
Plasmatherm SLR720 shuttle lock RIE for compound semiconductor etching
- Manufacturer: Plasma-Therm
- Model: SLR-720
Plasmatherm SLR-720 RIE tool Configured for etching of metals and compound semiconductors Previous usage was etching of GaAs with chlorine chemistry PC controller. Vacuum load lock with wafer transfer robot. ...
Plasmatherm SLR 770 shuttle lock ICP inductively coupled plasma etch system for compound semiconductor process
- Manufacturer: Plasma-Therm
- Model: SLR
Plasmatherm SLR-770 ICP Shuttle Lock Inductively Coupled Plasma Etch System. Configured for etching of metals and compound semiconductors Previous usage was deep etching of GaAs with chlorine chemistry PC cont...
GaSonics PEP 3510A/A Dual Chamber
- Manufacturer: GaSonics
The GaSonics PEP 3510A is a versatile microwave downstream photoresist removal system, designed for clean, damage-free removal of photoresist. PEP 3510A utilizes a combination of platen and lamp wafer heating res...
San Jose, CA
GaSonics L3510 Single Wafer Ashing System
- Manufacturer: GaSonics
The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L35...
San Jose, CA- Trusted Seller
TEL U2e-655II upgraded to U2e-855II Oxide Etcher
- Manufacturer: Tokyo Electron - TEL
TEL U2e-655II upgraded to U2e-855II Oxide Etcher For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration. Configuration: 1) MFC(MASS FLOW CO...
Trim, Ireland - Trusted Seller
Kensington CSMT-4 200mm Wafer Sorter
- Manufacturer: Kensington
Kensington CSMT-4 200mm Wafer Sorter This Kensington CSMT-4 200mm Wafer Sorter is used surplus and is being sold as is. It was uninstalled from a fab in working condition, however, has not been tested since. It i...
Trim, Ireland - Trusted Seller
2005 LAM Rainbow TCP 9600SE II standalone with DSQ - 150mm Plasma Etch
- Manufacturer: Lam Research - Novellus
- Model: TCP 9600SE
LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch Vintage: 2005+/-5j Wafersize: 150mm 200mm convertible: Yes Former BelGaN process: metalpets TECHNICAL SPEC FOR Etch tool System Model: LAM Rainbow...
Europe - Trusted Seller
StripperAsher
- Manufacturer: Unknown
System de-installed on 23-May-14. System still located at its Fab location. Process: Etch-Ashing Wafer Handling Configuration -Full batch/ single wafer: Single wafer -Robot: Yaskawa robot -Robot blade: Dual blade...
Bree, Ireland
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