Used SPTS Etching Systems in USA

STS / SPTS STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete

• Manufacturer: SPTS

2018 STS / SPTS Versalis fxP Etcher

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...