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GaSonics L3510 Single Wafer Ashing System
- Manufacturer: GaSonics
The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L35...
San Jose, CA
GaSonics L3510E Isotropic Etch System
- Manufacturer: GaSonics
The GaSonics L3510E is a high etch rate, downstream isotropic etching system, designed to provide isotropic profiles along with the ability to etch or ash at low temperatures. Utilizing the proven L-Series 3510 p...
San Jose, CA
Branson IPC L3200
- Manufacturer: Branson
Dual quartz chambers for 100-150mm wafers, cassette to cassette operation. Features: Automatic pick-and-place wafer handling Automatic pneumatic soft-lift assemblies for each chamber in-line gas filters (0.05 mic...
San Jose, CA
Branson IPC 4000 Barrel Asher
- Manufacturer: Branson
Features: Wafer capability up to 8" RF generator model PM119 Two process gas capability Specifications: Wafer capaility up to 8" 10" quartz chamber
San Jose, CA
GaSonics IPC Series 9104 Plasma Asher
- Manufacturer: GaSonics
The GaSonics 9104 is a plasma asher from the GaSonics IPC series. Features: 12" (diamater) 20" (D) quartz chamber System includes 4 MFC's 1000W automatch network Temperature probe Multistep / multirecipe capabili...
San Jose, CA
SPEC 3510E PC Isotropic Etch System
- Manufacturer: GaSonics
SPEC Equipment has developed the new GaSonics L3510E PC isotropic etching system. Designed for high etch rates, the 3510 PC provides isotropic profiles along with the ability to etch or ash at low temperatures. T...
San Jose, CA
Anatech 600 Series Model SP150 Quartz Barrel Plasma Asher / Desum
- Manufacturer: Anatech
Anatech 600 Series Model SP150 Quartz Barrel Plasma Asher / Desum Specifications: Barrel Plasma Asher / Desum Model SP150 Quartz 300W, 13.56Mhz Power Supply Two gas input Quartz Chamber 10" diameter x 18" long 9"...
San Jose, CA
Plasma-Therm 730 SLR PECVD Load-Locked System
- Manufacturer: Plasma-Therm
- Model: SLR
Plasma Shuttle-Lock load-lock loading system with platen transfer. Features: Windows operating system Top electrode is RF powered and the substrate is temperature controlled. Inlcudes vacuum pump with roots blowe...
San Jose, CA
Matrix 105 Asher System
- Manufacturer: Matrix
- Model: 105
Model 105 low temperature asher. Features: Single wafer Single cassette Microprocessor controlled menu-driven Multi-step program (three steps + over etch) process program Wafer lift pin assembly (up and down) Tem...
San Jose, CA
Tegal 903E Plasma Etch System
- Manufacturer: Tegal
Cassette to cassette single wafer plasma etcher system. Features: Cassette to Cassette Pick and Place Wafer Handling Specifications: Modularized for ease of Service Flow ranges: 1. 0-15 sccm (N2 calibrated) 2. 0-...
San Jose, CA
Branson IPC L2101
- Manufacturer: Branson
Branson/IPC Mod. S2100-11220 Reactor Center Features: One 12" (Diamter) x 20" (D) quartz chamber Three channel controller with three rotometer gas flow controllers Built in temperature controller for preheat in C...
San Jose, CA
GaSonics AE2001 Etch System
- Manufacturer: GaSonics
Microwave downstream etcher. Features: Cassette to cassette wafer handling Front and backside etching Variable platen temperature Alumina (ceramic) plasma tube Fluorine compatible chamber SECS II interface Multip...
San Jose, CA
GaSonics Aura 1000
- Manufacturer: GaSonics
The GaSonics Aura 1000 single-wafer photoresist asher is an automated tool designed as a flexible downstream plasma photoresist removal system for high-volume wafer fabrication. GaSonics offers the Aura in direct...
San Jose, CA
GaSonics PEP Iridia
- Manufacturer: GaSonics
The GaSonics PEP Iridia is a dual chamber etcher used to independently deskin (remove a crusted layer of photoresist without penetrating a lower layer of conventional photoresist) or to independently remove photo...
San Jose, CA
March PX-1000 Batch RIE Asher/Etcher System
- Manufacturer: March Instruments
- Model: PX-1000
Downstream RIE or isotropic plasma barrel asher/etcher system. Features: Digital panel meters 5 shelves unit 5 gas output Specifications: 1000 Watt output
San Jose, CA
Semitool SRD-270 Surface Treatment / Cleaning
- Manufacturer: Semitool
- Model: SRD-270
Good condition Semitool SRD-270 Surface Treatment / Cleanings manufactured in 2010. Located in USA and other countries. Click request price for more information.
Europe