Used Probe Stations

Inspect stage motion, microscope optics, probe alignment, chuck flatness, vacuum integrity, and controller function. Ask for maintenance records, probe card compatibility, software versions, and example test setups. Verify parts availability and whether calibration certificates are included.

Transport should use a climate-controlled, vibration-damped crate with internal bracing for the microscope, stage, and delicate electronics. Remove loose probes, secure moving axes, pack consumables separately, and hire carriers experienced with lab/semiconductor equipment. Insure the shipment and document serial numbers before pickup.

Keep optics and probes clean, maintain vacuum seals, lubricate guideways per manual, and exercise motion axes. Schedule periodic stage flatness and position accuracy calibration, verify thermal chuck temperature accuracy, and update software/firmware. Replace worn probe tips and consumables to maintain measurement integrity.