Rudolph Research Auto EL IV Ellipsometer
- Manufacturer: Rudolph
- Model: Auto EL-IV
The AutoEl IV has automatic 3 wavelength operation and a scanning stage. Multiple wavelength operation gives this instrument more flexibility for meauring multiple film stacks. The scanning stage allows wafer uni...
San Jose, CA
Rudolph Research FE-III Focus Ellipsometer
- Manufacturer: Rudolph
- Model: FE-III
The FE-III has fully automatic operation and a scanning stage. Unique optical and detection systems measure ellipsometric parameters over an angle range of 40 to 70 degrees simultaneously, giving more flexibility...
San Jose, CA
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