Used Mass Flow Controllers in Tokyo, Japan

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:300SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-K

Gas:N2O Flow:2LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410-UC

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK2

Gas: CF4 Flow: 500 CCM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

Gas:N2 Flow rate:5LM Device name: Mass flow controller (MFC)

Aera FC-780C

Flow rate: 5SCCM Gas: O2 Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-310

• Manufacturer: Horiba

Gas: 20% SiH4/He Flow: 2 L/min Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400MC

Gas: BCI3 Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

Gas: CHF3　Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410Z

Gas: SiH4 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

• Manufacturer: Horiba

Gas: SF6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

MKS M100B02852CS1BV

Gas: CH4 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)