2007 Tel ACT12
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-12
two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE last time in production: 07.08.2024
Regensburg, Germany2004 Tel ACT8-D
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-8
ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3
Regensburg, Germany