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Used processing

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    Balzers LFC 150 Plasma Cleaning

    Balzers LFC 150 Plasma Cleaning

    • Manufacturer: Pfeiffer Balzers
    • Model: LFC 150

    The LFC150 is configured for batch plasma processing of strips placed in slotted magazines and of wafers. The UCP plasma cleaning concept is based on chemical reactions of gas-phase species with the contaminated ...

    Bree, Ireland