Used Surface Treatment / Cleaning

Axcelis Fusion 200ACU Asher. Dual robot arm

• used

• Manufacturer: Axcelis

Used, looks complete, very clean 8 inch wafer

Gasonic 9104 Quartz Chamber Plasma Asher 15698-02, ENI OEM-12B-06 RF Generator

• used

• Manufacturer: ENI

Used, looks complete, very clean Wafer size (inch): 4, 6

2007 TEL Trias

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Trias 4-Chamber TiN Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-057096: Mfg 2007. (traps out for cleaning) Includes: pow...

Tepla 600 Plasma Asher (RF)

• used

• Manufacturer: TePla
• Model: 600

150mm As-is or refurb

Tepla 300 Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

4 available 150mm Refurbished

Tepla 300 SemiAuto Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

150mm Refurbished

Tepla 300 PC Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

150mm Refurbished

JST 3 DRUM CR ETCH

• used

• Manufacturer: JST

JST Etch Bench/ SA0074RO

• used

• Manufacturer: JST

Verteq Wet Bench Nitride Etch, robot arm

• used

• Manufacturer: Verteq

Used, looks complete, very clean 8" wafer

Verteq Wet Bench Oxide Etch, robot arm

• used

• Manufacturer: Verteq

Used, looks complete, very clean 8 inch wafer

Yield Engineering YES-III HMDS Vapor Prime Oven

• used

• Manufacturer: Yield Engineering
• Model: YES

Refurbished

Yield Engineering YES 58 HMDS Vapor Prime Oven

• used

• Manufacturer: Yield Engineering
• Model: YES-58

Refurbished

2006 TEL Trias

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Trias 4-Chamber Ti Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-054098: Mfg 2006. Includes: 2ea RF cabinets, each w/...

2015 TEL Trias e+

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Traise+ 4-Chamber ASFD CVD System, 300mm, w/ TRT-TMZZ triple loadport frontend, TRT-LMZZ transfer chamber, 4ea process chambers assy# TEX-061: Mfg 2015. Includes: power distribution cabin...