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TMP-150/200
This series of equipment is suitable for CMP polishing equipment for thin films (dielectric layers), including oxide, metal, STI, SOI, MEMS and other products of flat polishing. Adopting airbag film flexible pres...
Beijing, China
TFP-2310
The equipment is equipped with 3 polishing stations and 8 polishing heads, which has high processing efficiency. It has polishing disc cooling and temperature monitoring system to ensure the constant temperature ...
Beijing, China