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New Supporting Equipment (Semiconductors) in Gyeonggi-do, South Korea

  • Wintel EER

    Wintel EER

    • Manufacturer: Wintel

    LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Metal electrode inserted in edge ring changes the sheath profile in wafer edge region

    Gyeonggi-do, South Korea
  • Wintel HARC

    Wintel HARC

    • Manufacturer: Wintel

    LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Aspect Ratio possible for contact cleaning ＞ 50:1 Removable sub-layer Materials : Oxidizedtungsten and poly silicon Side wall loss ＜1Å (SiO2, ...

    Gyeonggi-do, South Korea