Used Supporting Equipment (Semiconductors) in Arizona, USA

Mirra and Reflexion® CMP Equipment

Automated system uses combination of chemistry and abrasion to remove specific amounts of material from wafer surfaces Industry-leading 200mm CMP on all polishing applications Dry-in and dry-out wafer processing ...

SpeedFam IPEC CMP Polishers

• Manufacturer: Speedfam

Fully automated, precision CMP tool Wafer planarization from 100mm to 200mm Suited for repeatable materials polishing applications with operational and processing flexibility Automatic wafer handling Two platen, ...

Strasbaugh

• Manufacturer: Strasbaugh

Fully automated precision polishing Ideal for applications that require repeatability with operational and processing flexibility Automatic wafer handling Can polish two wafers on a single platen to maximise thro...

Applied Materials Mirra

• Manufacturer: Amat

The Applied Materials Mirra CMP Tool is a Dry In – Wet Out (DI-WO) type of CMP machine which incorporates three polishing platens. The four wafer carriers are supported by a carousel transfer mechanism that moves...

Ontrak Synergy/Integra

• Manufacturer: OnTrak
• Model: Synergy

These scrubbers combine the successful principles of wafer cleaning established by OnTrak for optimized mechanical slurry particle removal plus metal contamination removal on post-CMP wafers and substrates using ...

Strasbaugh 6EG

• Manufacturer: Strasbaugh

The remanufactured Model 6EG CMP Planarizer by Axus Technology, provides an economical way for limited production fabs, and research groups to polish thin films on 300mm substrates, achieving polishing results co...

Dynamic Slurry Blend Carts

• Manufacturer: AXUS TECHNOLOGY

Axus Technology’s Dynamic Slurry Blend Carts are an inexpensive way to handle your slurries in your fab without creating a mess trying to move around 5 or 15 gallon buckets of open slurries. The carts are made to...

Axus Surface

• Manufacturer: AXUS TECHNOLOGY

The Axus Surface wafer polisher is a fully automated, precision tool for CMP polishing of semiconductor wafers used to achieve flatness, uniformity and planarization on patterned/device wafers. The Surface, which...

Cosmo-3 Customizable Slurry Delivery System

• Manufacturer: AXUS TECHNOLOGY

Take the Chaos out of Slurry Distribution! The Axus Technology Cosmo-3 Customizable Slurry Delivery System is the ultimate precision blending and distribution system specifically designed for wafer manufacturing ...

Avalon

• Manufacturer: Avalon

Membrane carriers are an industry proven, widely used technology offering low consumables cost and efficient maintainability. Axus designed carriers can be retrofitted onto existing CMP tools, significantly enhan...