New Metrology / Inspection (Semiconductors) in Japan

HORIBA, Ltd. PD10

• Manufacturer: Horiba

Reticle / Mask Particle Detection System Next-generation inspection platform to meet future needs PD10 is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platf...

HORIBA, Ltd. Xtrology

• Manufacturer: Horiba

Fully Automated Thin Film Inspection System Combines multiple sensors and automation technology to provide increased value for semiconductor wafer inspection The new product, "Xtrology," Fully Automated Thin Film...

HORIBA, Ltd. PD10-EX

• Manufacturer: Horiba

Reticle / Mask Particle Detection System Complete particle detection and removal with one machine for enhanced efficiency and yield improvement in semiconductor manufacturing processes Since its launch in 1984, t...

PLATO Series

Automatic Photoluminescence Mapping System PLATO-LED Automatic Photoluminescence Mapping System General Spec Photoluminescence Mapping : Peak wavelength, Peak intensity, Integrated intensity, FWHM, Al contents in...

HORIBA, Ltd. RP-1

• Manufacturer: Horiba

Reticle/Mask Particle Remover The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction. Routinely removing the particles before the lithography process extends the replacem...