Used Lithography (Photolithography)

2004 TEL Act 12

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Main Controller Type: NA Wafer Flow: Right to Left Configuration 2) Missing Parts List: No CSE A. 3-1 DEV Unit - Spin Chuck - Wind Velocity Sensor B. 3-2 DEV Unit - Spin Chuck - ARM#2(Rinse) Motor Driver...

2000 TEL ACT 8

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Main Controller Type: TEL Controller #2 Wafer Flow: Right to Left Configuration A. Wafer Size: 200mm, DUV Application, Double Block System B. Wafer Flow: Right to Left(CSB Unit is in Right side and Interface ...

Tel Mark Vz 2D Developer

• used

• Manufacturer: Tokyo Electron - TEL

Complete Wafer size: 200mm

Tel MARK-Vz 2-Coater and 2-Developer CLEAN Track Systems

• used

• Manufacturer: Tokyo Electron - TEL

These two MARK-Vz components are as follows: 2C Main Body: 1 set(No missing parts) 2D Main Body: 1 set(No missing parts) Thermo Controller Rack: 1 set Drain Box: 1 set UPS: 2 sets Power Box: 2 sets THC: 1 ...

TEL / TOKYO ELECTRON Mark Vz 2D Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: MARK VZ

2-Developer, no-missing parts

TEL / TOKYO ELECTRON Clean Track Mark 7 Photo Resist Coat System

• used

• Manufacturer: Tokyo Electron - TEL

See attached configuration file below. 2-coAter, 3-spiner, no-missing parts

1993 DNS SC-W60A-AV

• used

• Manufacturer: Dainippon Screen
• Model: SC-W60A-AV

OEM: DaiNippon Screen MFG Co., Ltd. Model: SC-W60A-AV Vintage: Nov. 1993 Config: 2-Coater

1995 DNS Dainippon Screen SK-W80B-AVPE 2C2D Coater Developer

• used

• Manufacturer: Dainippon Screen
• Model: SK-W80B-AVPE

In line Left to right 2 coater 2 developer System Details a. Computer: S/N: FC9801B, Included HDD, Included Backup Disc b. Coater Unit: 3 and 4, 4-Nozzle with Iwaki Pump c. Developer Unit: 5 and 6, 2-Nozzle...

TEL Clean Track Mark II Coater Developer

• used

• Manufacturer: Tokyo Electron - TEL

TEL Clean Track Mark II Coater Developer

• used

• Manufacturer: Tokyo Electron - TEL

2003 TEL ACT8

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Vintage 2003 refurbished by TEL in 2023 One crate got damaged in transit There are 2 coat units, 2 develop units and 6 hot/cold plates. Condition: - The system comprises 7 crates, with only one crate damaged ...

2004 TEL ACT12

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Wafer Size: 12 Configuration: 4C Dual Block with empty Dev. units, L->R, Inline type, Type #3 Main Controller Foup x 4 R-Gen Pump 9 LHP, 6 HHP and 4 PHP, WEE, ADH, 9 CPL, AC Power Box Chemical Cabinets B...

TEL Mark7

• used

• Manufacturer: Tokyo Electron - TEL
• Model: MARK7

TEL Mark-7 Track 2C 3D installed as is where is 50% down, and 50% prior to deinstall

Karl Suss ACS 200

• used

• Manufacturer: SÜSS MicroTec
• Model: ACS 200

As is

Tel Mark Vz 2C Coater

• used

• Manufacturer: Tokyo Electron - TEL

Complete Wafer size: 200mm