Used Lithography (Photolithography)

Lens Piezo Driver Power Supply

• used

• Manufacturer: Nikon

4S001-115

Vibrating Mirror Amp

• used

• Manufacturer: Nikon

4S586-274

Pneumatics Box

• used

• Manufacturer: Nikon

S/G Controller Pcb

• used

• Manufacturer: Nikon

4S015-046H

Camera Switching Box

• used

• Manufacturer: Nikon

NVCEX-X2A-D

Cognex 8200 Unit

• used

• Manufacturer: Nikon

Reticle Loader Library Pcb

• used

• Manufacturer: Nikon

4S018-679

Reticle Robot

• used

• Manufacturer: Nikon

Wafer Loader Robot X Drive

• used

• Manufacturer: Nikon

Wafer Loader Robot Z Drive

• used

• Manufacturer: Nikon

2002 TEL Tel act 8 coater/Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

3 Coater 2 Developer Currently set up for 4 Inch

TEL CLEAN TRACK ACT 12 COAT ONLY

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

3 available 300mm Coat only Track Resist Processing Equipment · Slam Stand Alone Track · 2 Wafer Transfer Robot Arms: 1 Carrier, 1 Process · 3 FOUP Loader Port · SECS/GEM I/II Interface required is iUSC ·...

2019 Tokyo Electron Ltd. CLEAN TRACK ACT 8 COAT ONLY

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Coat only Track Resist Processing Equipment Date of Manufacture: 2019-01-01 Currently Configured for: 200mm TEL ACT8 COATER 2-Coat Running in production

TEL Act 8 Parts List

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Tel Act 8 Parts List OEM: Kondoh Industries Part name: PRA/Spinner FFU's P/N: 2980-091458-11 OEM: Kondoh Industries Part name: PRA/Spinner FFU's P/N: 2980-091458-11 Description: Comes With Two Suspension A...

2005 Suss Microtec AG ACS200

• used

• Manufacturer: SÜSS MicroTec
• Model: ACS 200

Linear Wafer Tracks (Resist Coater/Developer) Resist Processing Equipment Date of Manufacture: 2005-12-31 Currently Configured for: 200mm Included: Chiller: Julabo; 1 fully refurbished robot as sparepart