Used Lithography (Photolithography)

COAT STATION

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

COAT STATION

chilling hot plate

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

chilling hot plate

CASSETE DRIVE

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

CASSETE DRIVE

LOADER

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

LOADER

CHEMICAL I/O BOARD CPC-G225B01A-11 CHEMICAL CONN BOARD CPC-G226A01B-11 ANALOG BOARD TKB2192

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

CHEMICAL I/O BOARD CPC-G225B01A-11 CHEMICAL CONN BOARD CPC-G226A01B-11 ANALOG BOARD TKB2192

CONVERTER KRA-12-HH

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

CONVERTER KRA-12-HH

SEC Array Lamination System

• used

• Manufacturer: Semiconductor Equipment Corporation

To perform lamination after dicing process in array form

CHAD Mate200 Automation Ball Placement system

• used

• Manufacturer: CHAD

CHAD Mate200 Automation Ball Placement system

Wafer Loader Ceramic Load/Unload Right Arm

• used

• Manufacturer: Nikon

Wafer Loder Full OF Unit

• used

• Manufacturer: Nikon

Wafer Loader Centering LED Tower

• used

• Manufacturer: Nikon

Wafer Loader Load/Unload Arm Mounts

• used

• Manufacturer: Nikon

Wafer Stage Y Amp

• used

• Manufacturer: Nikon

4S587-156-1

Accelerometer Amp

• used

• Manufacturer: Nikon

4S586-613

Reticle Stage Fine Amp

• used

• Manufacturer: Nikon

4S587-130-1