- Trusted Seller
Oxford Plasmalab 100 PECVD
- Manufacturer: Oxford
- Model: PlasmaLab 100
OXFORD PLASMALAB 100 PECVD consisting of:- Model: Plasmalab 100 PECVD- Process: SiO2 and SiN deposition- Max Wafer Size Capable: 8"/200mm- Single wafer process up to 8-inch wafer- Load Locked Chamber- 600W RF Gen...
Decatur, GA - Trusted Seller
Oxford PlasmaPro NGP1000 PECVD
- Manufacturer: Oxford
- Model: PlasmaPro NGP1000
OXFORD PLASMAPRO NGP1000 PECVD SYSTEM consisting of:- Model: Oxford PlasmaPro NGP1000 PECVD- Load Locked Chamber - System PC, Keyboard, Mouse- Windows 7 w/ PC4500 Control Software- X20 PLC- 490mm Diameter Aluminu...
Decatur, GA - Trusted Seller
1995 Oxford Plasmalab SLR 720 RIE
- Manufacturer: Oxford
- Model: Plasmalab
Single chamber Plasmatherm SLR 720 RIE. It's got a load locked chamber, upgraded PC, turbo pump, etc Etcher 8"/200mm wafers max, single load-locked chamber 200mm - Model: SLR-720 - Single chamber with load l...
United States 
Oxford Instruments Plasmalab 800 Plus PECVD with 460mm diameter electrode (2009)
- Manufacturer: Oxford
- Model: PlasmaLab 800
Large Capacity Open Loaded Plasma Enhanced Chemical Vapor Deposition System. 460mm diameter electrode offers a capacity of up to twelve 4 in. wafers. Ideally suited for batch PECVD processing where excellent ac...
$89,500 USDSan Jose, CA- Trusted Seller
Oxford Plasmalab 80 Plus PECVD tools
- Manufacturer: Oxford
- Model: PlasmaLab 80
2x available PECVD 80+ SiO2 Dep - Non-functional tool but can be repaired (requires Silane MFC) - Designed for 4” wafers but can do 6” - Deposits SiO2 & SiH4 @ 300C - All MFCs for above processes are operational ...
United Kingdom
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