Used plcs

2006 Oxford PlasmaLab System 100 RIE (FL) Reactive Ion Etcher

• Manufacturer: Oxford

Condition : Refurbished with OEM specifications Configuration: - Supports wafer sizes up to 300mm (330mm Platen) - RIE set up for SiO2 Etch - RF Generator : Advanced Energy RFX 600A ; 600W, 13.56MHz, - Chamber ...