Building Filters
2017 PVA SPA Waferscale WS300 (MET902-03)
Waferscale for 8" STD / 8" Taiko / 12" STD/ 12" Taiko Wafer weighing system - Filmthickness
Regensburg, Germany
2015 PVA SPA Waferscale WS200 (MET902-02)
Waferscale for 8" Wafer STD Wafer weighing system - Filmthickness
Regensburg, Germany
2001 Canon 5500iz
- Manufacturer: Canon
'- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed - Hg-lamp will be rmoved prior shipping- Coolant will be r...
Regensburg, Germany
Regensburg, Germany
Regensburg, Germany
Regensburg, Germany
Regensburg, Germany2016 Nexx Apollo PVD
The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafe...
Regensburg, Germany
Regensburg, Germany1995 CDE CDE80/3 Plasma Etch
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany
2008 ASM Advance 400
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical - Advance 400 2 Reactor atmospheric Robot defect and need service
Regensburg, Germany
1995 Fusion Systems Inc. 200 PCU
- Manufacturer: Fusion Systems Inc.
Die Anlage war bis zur Deinstallation in Jänner 2024 in Produktion. FUSION 150/7D
Regensburg, Germany
2011 Mechatronics Inc TWH 001 06 11
- Manufacturer: Mechatronics Inc
Power requirements: 200-240 V 50/60 Hz 3 Phase | Weight: 1,213 lb (550 kg)
Regensburg, Germany
2013 Ismeca KGD01
- Manufacturer: Ismeca
KGD01 NX32W Minimum: 200 mm | Maximum: 200 mm | Set size: 200 mm | Extended description: Details at KGD01 System Konfig.png | Power requirements: 230 V 15.0 A 50 Hz
Regensburg, Germany
Regensburg, Germany
