Used Surface Treatment / Cleaning

Semitool 470F Single stack SRD

• Manufacturer: Semitool
• Model: SRD-470F

4/4

Semitool 470F Single stack SRD

• Manufacturer: Semitool
• Model: SRD-470F

Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

• Manufacturer: Yield Engineering
• Model: R3

Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an...

Tepla 600-AL (autoload)

• Manufacturer: TePla
• Model: 600-AL

Tepla 600-AL (autoload) plasma asher 230v, 13 amps, 50/60hz 1731 hours - Semi-Automatic RF Plasma System - Can process up to 200mm wafers - Used for photoresist stripping and surface cleaning, as well as etc...

March Instruments PX1000E8 Plasma Asher / Etcher

• Manufacturer: March Instruments
• Model: PX-1000

Batch system for plasma cleaning or etching. Currently configured with one shelf set: 17 in. x 14 in. Shelves are mounted vertically from top to bottom. Not standard horizontal mounting. Can accommodate multi...

1995 Oxford Plasmalab SLR 720 RIE

• Manufacturer: Oxford
• Model: Plasmalab

Single chamber Plasmatherm SLR 720 RIE. It's got a load locked chamber, upgraded PC, turbo pump, etc Etcher 8"/200mm wafers max, single load-locked chamber 200mm - Model: SLR-720 - Single chamber with load l...

2004 Semitool SST-C-642-250

• Manufacturer: Semitool
• Model: SST-C-642-250

Batch Wafer Processing Etch/Clean - Wet Processing Currently Configured for: 200mm 6 tanks, 4 of them heated, 2 chambers.

2001 STS MESC Multiplex ICP ASE

• Manufacturer: STS

STS ASE Multiplex ICP System (Bosch Process) OEM = Surface Technology Systems Limited (AKA: STS) Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch) Description of Pr...

2011 DNS WS 820 L

• Manufacturer: Dainippon Screen
• Model: WS-820L

- Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch) - Wafer Flow Left to right - Cassette included Components to include: - Main body - Loader / Unloader - Two robots for bath to bath trans...

Tepla 300 AL-PC Plasma Asher

• Manufacturer: TePla
• Model: 300

- Model: 300 PC Main System - Manual wafer load plasma asher - Designed for Wafer Cleaning and Descum - Plasma Chamber: Quartz - Plasma Chamber Dims: 245mm diameter, 380mm depth - Plasma Generation: 2.45 GHz...

Gasonics 9104

• Manufacturer: GaSonics
• Model: 9104

Gasonics 9104 plasma asher (never installed with new control box) Features and Specifications Gasonics/IPC 9104 Ash/Etch system 12"(dia) x 20"(D) quartz barrel soft pumping and purge valving low particulate ...

2004 Semitool Sirius System

• Manufacturer: Semitool
• Model: Sirius

- Model: Sirius HydrOzone - Wafer Size: 150mm & 200mm wafer capable - Process: DI water/ozone - Rinse: DI water with ammonium hydroxide - Dry: N2 - Spray processing chamber. - Uses a minimal amount of deion...

2018 DNS CW-2000- 2 Available

• Manufacturer: Dainippon Screen
• Model: CW-2000

These are both 200mm, 2018 vintage and in excellent condition. They were fully operational prior to deinstall a couple of months ago. Both tools have the same configuration. They have 6 process stations. Stat...

GASONICS 99-0339 Aura A2000LL Plasma Asher Stripper Novellus A95-205-01 Spare

• Manufacturer: GaSonics

- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked - Sold As-Is Installed Components - Load Lock Chamber Part No: A95-205-01, 56-7923 - Asyst Technologies Index...

LAM TCP 9600SE

• Manufacturer: Lam Research - Novellus
• Model: TCP 9600SE

Currently Configured for: 200mm Software: Envision 2.0-068 Main Chamber - Fixed Gap ESC - Metal Etch ESC - Anodized Aluminum VAT 65 Pressure Controller Leybold Mag1500 High Temp Turbo PLL - DSQ Strip Chambe...