Used Surface Treatment / Cleaning

AMAT 8115

• Manufacturer: Amat
• Model: 8115

Used, looks complete, very clean 6inch wafer Oxide Etch

Axcelis Fusion 200ACU Asher. Dual robot arm

• Manufacturer: Axcelis

Used, looks complete, very clean 8 inch wafer

Gasonic 9104 Quartz Chamber Plasma Asher 15698-02, ENI OEM-12B-06 RF Generator

• Manufacturer: ENI

Used, looks complete, very clean Wafer size (inch): 4, 6

2007 TEL Trias

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Trias 4-Chamber TiN Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-057096: Mfg 2007. (traps out for cleaning) Includes: pow...

Yield Engineering YES-III HMDS Vapor Prime Oven

• Manufacturer: Yield Engineering
• Model: YES

Refurbished

Yield Engineering YES 58 HMDS Vapor Prime Oven

• Manufacturer: Yield Engineering
• Model: YES-58

Refurbished

2006 TEL Trias

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Trias 4-Chamber Ti Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-054098: Mfg 2006. Includes: 2ea RF cabinets, each w/...

2015 TEL Trias e+

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Traise+ 4-Chamber ASFD CVD System, 300mm, w/ TRT-TMZZ triple loadport frontend, TRT-LMZZ transfer chamber, 4ea process chambers assy# TEX-061: Mfg 2015. Includes: power distribution cabin...

YEILD Yield Engineering (YES) model 3TA HMDS vapor prime oven

• Manufacturer: Yield Engineering
• Model: YES-3

Mattson Process chambers Module with LF10 and RF30S RF generators qty =8

• Manufacturer: Mattson

Used, Chamber only

Applied Materials 8330

• Manufacturer: Amat
• Model: 8330

Applied Materials 8330 Metal Etch 150 mm system for etching Metal 3 available

March PX-1000 Plasma Asher

• Manufacturer: March Instruments
• Model: PX-1000

300mm As-is or refurb

Yield Engineering YES 18P Image Reversal Oven

• Manufacturer: Yield Engineering
• Model: YES

Refurbished

Yield Engineering YES 58SM HMDS Vapor Prime Oven

• Manufacturer: Yield Engineering
• Model: YES-58

Refurbished

Yield Engineering YES 15 HMDS Vapor Prime Oven

• Manufacturer: Yield Engineering
• Model: YES-15

Refurbished