Used Lithography (Photolithography)

TEL Act12 Single Block Stand Alone

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Manufacturer: Tokyo Electron ➢ Tool Type: Slam stand-alone Track ➢ Model: ACT 12 ➢ Wafer Size: 300 mm ➢ Direction: LEFT HAND SIDE ➢ Slam Stand Alone Track ➢ 2 Wafer Transfer Robot Arms: 1 Carrier, 1 Process...

TEL Act 12 Slam Stand Alone Track LH Layout

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Recently powered off and just crated and in warehouse. ➢ Manufacturer: Tokyo Electron ➢ Tool Type: Slam stand-alone Track ➢ Model: ACT 12 ➢ Wafer Size: 300 mm ➢ Direction: LEFT HAND SIDE ➢ Slam Stand Alone ...

TEL ACT Clean Track 12 Single Block Tool

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Single Block LH type. Recently powered off and just crated and in warehouse ➢ Manufacturer: Tokyo Electron ➢ Tool Type: Single Block Clean Track ➢ Model: ACT 12 ➢ Wafer Size: 300mm ➢ Direction: LEFT HAND SI...

Chemcut Model 2315D Spray Resist Develop system

• Manufacturer: Chemcut

Used, looks complete, very clean

DNS SK 80 BWBVPE Track

• Manufacturer: Dainippon Screen
• Model: SK-80

- 6 spinning stations - 10+ hot & cold ovens/plates

1996 DNS 80B Develop track

• Manufacturer: Dainippon Screen

1996 DNS 80B Develop track 6" wafers

1998 TEL CLEAN TRACK ACT 8 SINGLE BLOCK

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Single Block (Resist Coater/Developer) Resist Processing Equipment Date of Manufacture: 1998-12-31 Currently Configured for: 200mm

1997 TEL CLEAN TRACK ACT 8 MULTI BLOCK

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Multi Block (Resist Coater/Developer) Resist Processing Equipment Date of Manufacture: 1997-12-31 Currently Configured for: 200mm

2006 TEL Clean Track ACT-8 Dual Block Wafer Coater – Developer

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Condition Used/See Description • Dual Block, 4 Load Port/1 Side Port • 4 Coaters • 3 Developers • 1 TCT • 14 PHP Hot Plates • Currently In-Use for Production • Vintage 2006

TEL Act 8 Part TEL Clean Track

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part TEL Clean Track for Tel Act 8 Part Name Low/High Temperature Hot Plate 3-12 Height .00 Mtrs Width .00 Mtrs Depth .00 Mtrs Physical Volume .00 M3 Weight 15.00 Kgs

2000 TEL Act 8 Coater / Developer

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

- 2 Coater - 2 Developer 2000 Vintage 4"

2000 TEL Tel act 8 coater/Developer

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

2 Coater 2 Developer Currently 4 Inch set up

Tokyo Electron TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

TEL ACT12-300 Dual Block Track

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Recently powered off and still in the clean room and waiting for fixture for deinstall and rigging and crating. Tool type: dual process block track Wafer size: 300mm Direction: right hand side 4 blocks interf...

Solitec FlexiFab Coater / Developer

• Manufacturer: Solitec

- Model Flexifab - Currently set up for 6" Wafers - Automated Wafer Handling - Coater Module - Developer Module - Hotplate Module - Cybor Control Module & Power Supply - More Details Can be Found Here: htt...