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Used Nikon Wafer Slicing / Dicing in Meath, Ireland

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    Nikon S202+ Scanner

    • Manufacturer: Nikon
    • Model: S202

    - Res 250 nm - NA 0.60 - KrF excimer laser (248 wavelength) Exposure light source - Field 25 x33 mm exposure - Ratio 1:4 - Alignment accutacy (EGA, I M I + 3s ) ? 45 nm

    Trim, Ireland