Tokyo Electron Ltd. Trias Multi-Process
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Wafer size: 12"
Yongin-si, South KoreaLAM Alliance-A4 (TCP9400SE)
- Manufacturer: Lam Research - Novellus
- Model: TCP 9400SE
LAM ALLIANCE TCP9400 SE POLY ETCH With 2 Process Module
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
1993 LAM TCP9600SE
- Manufacturer: Lam Research - Novellus
- Model: TCP 9600SE
Process: ETCH | Size(mm): 200mm
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
PSK Inc. PSK SUPRA3
- Manufacturer: PSK
- Model: SUPRA3
PSK SUPRA3 PR STRIP MAKER : PSK, S/N : PSK06007 Process : Asher EFEM, TM(Transfer Module), 2 PM(Process Module) AC RACK, Cables
Gyeonggi-do, South KoreaPSK Inc. PSK TERA21
- Manufacturer: PSK
- Model: Tera 21
MAKER : PSK, S/N : PTK03022 Vintage : 2004-03-17, EQUIP ID : ETAC12 Process : Asher EFEM, TM(Transfer Module), PM(Process Module) AC RACK, Cables
Gyeonggi-do, South KoreaWintel LPR (Low-Pressure Removal)
- Manufacturer: Wintel
LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Normal ashing process with unique plasma source is possible. In particular, excellent results can beobtained from low O2 & No O2 processes. Low...
Gyeonggi-do, South Korea