Tokyo Electron Ltd. Trias Multi-Process
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Wafer size: 12"
Yongin-si, South KoreaLAM Alliance-A4 (TCP9400SE)
- Manufacturer: Lam Research - Novellus
- Model: TCP 9400SE
LAM ALLIANCE TCP9400 SE POLY ETCH With 2 Process Module
Yongin-si, South KoreaDNS AS2000
- Manufacturer: Dainippon Screen
- Model: AS-2000
DNS AS2000 SCRUBBER, Process : STI/SOD Position 1-Loader / Position 2-Double Brush Chamber / Position 3-Top Brush Chamber / Position 4-Dry Task Chamber
Yongin-si, South KoreaDNS AS2000
- Manufacturer: Dainippon Screen
- Model: AS-2000
DNS AS2000 SCRUBBER / Process : Container / PCMP Position 1-Loader / Position 2-Double Brush Chamber / Position 3-Top Brush Chamber / Position 4-Dry Task Chamber
Yongin-si, South KoreaDNS AS2000
- Manufacturer: Dainippon Screen
- Model: AS-2000
DNS AS2000 SCRUBBER / Process : SON / 60BCMP Position 1-Loader / Position 2-Double Brush Chamber / Position 3-Top Brush Chamber / Position 4-Dry Task Chamber
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
2009 DNS SU-3000
- Manufacturer: Dainippon Screen
- Model: SU-3000
Wafer size: 12" | Process: Cleaner | Shipping: EXW
Anseong-si, South Korea- Yongin-si, South Korea
1993 LAM TCP9600SE
- Manufacturer: Lam Research - Novellus
- Model: TCP 9600SE
Process: ETCH | Size(mm): 200mm
Yongin-si, South Korea
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