HORIBA STEC, Co., Ltd. D700uF
- Manufacturer: Horiba
Micro Flow Pressure Insensitive Mass Flow Module D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ≤ 5SCCM flow control has been very critical in high aspect ratio process. Specialized components an...
Kyoto, Japan
HORIBA STEC, Co., Ltd. D700T
- Manufacturer: Horiba
Best Performance Pressure Insensitive Mass Flow Module D700T is the best performance pressure-insensitive mass flow module designed for critical semiconductor manufacturing process. D700T adapted the HORIBA CRITE...
Kyoto, Japan
HORIBA STEC, Co., Ltd. D700MG
- Manufacturer: Horiba
High Speed & Precision Pressure Insensitive Mass Flow Module Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab t...
Kyoto, Japan
HORIBA STEC, Co., Ltd. SEC-Z500X Series
- Manufacturer: Horiba
Multi Range/Multi Gas Digital Mass Flow Controller This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-sc...
Kyoto, Japan
HORIBA STEC, Co., Ltd. D700WR
- Manufacturer: Horiba
Wide Range Pressure Insensitive Mass Flow Module The D700WR installs a new restrictor designed specifically for a wide range control application with high accuracy performance based on the CRITERION™ technology. ...
Kyoto, Japan
HORIBA STEC, Co., Ltd. DZ-100
- Manufacturer: Horiba
Ultra-thin Mass Flow Module The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technol...
Kyoto, Japan
FS-3000
- Manufacturer: Horiba
Thermal Flow Splitter FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller). By controlling MFC from MuCube equipped with the HORIBA STEC’s proprietary control algorithm, FS-300...
Kyoto, Japan
HORIBA STEC, Co., Ltd. CRITERION D500
- Manufacturer: Horiba
Pressure Insensitive Mass Flow Module This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve. The high level of performance provided b...
Kyoto, Japan
HORIBA STEC, Co., Ltd. SEC-N100 Series
- Manufacturer: Horiba
Digital Mass Flow Controller The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100...
Kyoto, Japan
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