2003 ANELVA C-7730FH
- Manufacturer: Anelva
- Model: C-7730FH
Manufacturing process: film deposition | Inch: 4
Tokyo, Japan2008 KOKUSAI DJ-853V
- Manufacturer: Kokusai
- Model: DJ-853V
Manufacturing process: film deposition | Inch: 6
Tokyo, Japan2006 ULVAC ei-5
- Manufacturer: Ulvac
- Model: EI-5
Manufacturing process: film deposition | Inch: Square Substrate
Tokyo, Japan2006 ULVAC ei-5
- Manufacturer: Ulvac
- Model: EI-5
Manufacturing process: film deposition | Inch: Square Substrate
Tokyo, Japan