AMAT Centura DPS 1
- Manufacturer: Amat
- Model: Centura
DPS Poly / Process 49 Soft Punch / 3 Process Chambers
Yongin-si, South KoreaAMAT Centura 5200
- Manufacturer: Amat
- Model: Centura
WxZ process Narrow Body Loadlock / WxZ process Chamber 4 / MS Cooldown / HP Robot / System Controller/AC Power Box / RF Generator Rack (2MT501)
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
TEL UNITY-EP
- Manufacturer: Tokyo Electron - TEL
- Model: UNITY-EP
Process Module 3 TiN/Ti-CVD Wafer size: 8"
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
AMAT (Applied Materials) P5000 PECVD 3 Chamber SiN
- Manufacturer: Amat
- Model: P5000
Plasma Enhanced CVD system (3 chamber, SiN process)
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
AMAT Centura 5200
- Manufacturer: Amat
- Model: Centura
Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack
Yongin-si, South KoreaAMAT CENTURA 5200
- Manufacturer: Amat
- Model: Centura
Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack
Yongin-si, South KoreaTEL Alpha 8SE
- Manufacturer: Tokyo Electron - TEL
- Model: ALPHA 8SE
Vertical LP-CVD System ALPHA-8SE / AL2O3 / Hafnium Process Furnace -N2 L/L / Wave Controller / Photohelic Gauge / Trans-LC / Boat Elevator / WVG system / Wafer Load Automation / 21 Cassette Stocker / Temperature ...
Yongin-si, South Korea