Amat Semvision Specifications

Specifications

Wafer size compatibility200,300
Measurement typesCritical dimension (CD), Overlay, Film thickness, Basic defect/visual inspection
Throughput50-300
Alignment accuracy≤50 nm

Amat Semvision description

The Amat Semvision is a wafer metrology and inspection platform designed to help fabs monitor critical dimensions, overlay and film properties across production lots. Built for integration into fab workflows, it offers fast wafer handling, automated recipe management and detailed process feedback to improve yield and reduce cycle time.

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