| Process types | PVD, CVD |
| Wafer size | 200-300 mm |
| Chamber configuration | Modular multi-chamber |
| Throughput | 50-200 |
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Phasetronics P1038A 3 Phase Lamp Driver AMAT 0015-09091 P5000 Precision 5000 New AMAT Applied Materials Part No: 0015-09091 For use with AMAT Applied Materials Precision 5000 P5000 CVD Etcher System This Phasetro...