P5000 2 chamber DhL Nitride for 150mm wafers
PECVD With four DLH chambers
2 chamber DxL Nitride for 200mm wafers
As is 200mm SILANE Process Gases: SiH4, NH3, N2O, HE, CF4, AR, N2 Stand alone setup Slit Valve Type: S Slit Slit Valve Opening: Kalrez Lamp module: Standard Heater window: Quartz Endpoint detector Cluste...
Quantity: 7 Condition: Used