Used automation in Tokyo, Japan

Horiba Estec Stec SEC-7355

H2 100SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

Sih4 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

Sih2CI2 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

Sih2CI2 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-4600

• Manufacturer: Horiba

H2,60SLM VCR Device name: Mass flow controller (MFC)

UB 5850E

CF4,10sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

N2, 50sccm Device name: Mass flow controller

SAM SFC-580MO4VD

Ar 100sccm Device name: Mass flow controller

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

HCI 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)