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CVD system Concept-150/200
- Manufacturer: Lam Research - Novellus
This system is applicable to 4/5/6 and 8-inch wafers and forms silicon oxide and silicon nitride films on the wafers by plasma CVD method. The basic configuration consists of three modules: a process module, an R...
Tokyo, Japan
WATKINS JOHNSON WJ900、1000シリーズ
- Manufacturer: Watkins-Johnson
This equipment is, 4/5/6 and 8-inch wafers. inch wafers, and can be used for plasma CVD The system is designed for 4/5/6 and 8-inch wafers and forms silicon oxide and silicon nitride films on wafers by the plasma...
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan