Used Lithography (Photolithography)

1993 DNS SKW-60A-BVPE Coater Developer

• Manufacturer: Dainippon Screen
• Model: SK-W60A-BVPE

EVG Hercules Lithography Track System (200mm)

• Manufacturer: EVG
• Model: Hercules

EVG Hercules Lithography system 200mm - available in working wafer fab cleanroom - July 2024

SEMIX / TAZMO

• Manufacturer: SEMIX

for Wafer Size: 4"- 6" Coater systems, 4"-6" (3) Zone hotplate Single / double cassette Fluoroware type with pitch of 3/16" for (25) Wafers SOG Nozzles: 0.85mm, 1/16" tubing Nozzle capping mechanism Nozzle clean...

FSI Polaris 2200 ( 200mm )

• Manufacturer: FSI

FSI Polaris 2200 - available July 2024 ( 200mm )

Nikon EX12B Stepper 200mm

• Manufacturer: Nikon

Nikon EX12B Stepper - available July 2024 ( 200mm ) contact : csisemi

MUSCAT T200 Developer 8/6"

• Manufacturer: MUSCAT

Available in a working cleanroom waferfab July 2024 - contact CSI Semi

MUSCAT SPL-347 Developer 8/6"

• Manufacturer: MUSCAT

Available from a working cleanroom waferfab in July 2024 - contact CSI Semi

Fairchild Convac FM 6000, Wafer Coater

• Manufacturer: Fairchild

Fairchild Convac FM 6000, Wafer Coater complete automatic edge handling for 150 mm wafers, 2 coating lines with IntelliGen coating pumps, incl.Spare parts (chucks, electronic boards etc. USED, IN GOOD VISUAL ...

2012 Raith eLINE Plus EBL System

• Manufacturer: Raith

Raith eLINE Plus EBL system (installed 2012) · Main system · Electronics control rack · Diaphragm vacuum pump · UPS · Chiller - Smallest beam size in the world of a professional EBL system - Ultra-high reso...

TEL Act 8 Part Dev 3-X Dispense Valve Solenoid Block

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Dev 3-X Dispense Valve Solenoid Block for Tel Act 8 Height .10 Mtrs Width .30 Mtrs Depth .05 Mtrs Physical Volume .00 M3 Weight 1.10 Kgs

TEL Act 8 Part Dev 3-2 Dispense Line/Dispense Valves/Water Jacket - Chemical Area Assembly

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Dev 3-2 Dispense Line/Dispense Valves/Water Jacket - Chemical Area Assembly for Tel Act 8 Height .60 Mtrs Width .60 Mtrs Depth .14 Mtrs Physical Volume .05 M3 Weight 4.80 Kgs

TEL Act 8 Part Dev 3-4 Exhaust Assembly To Facilities

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Dev 3-4 Exhaust Assembly To Facilities Height .09 Mtrs Width .86 Mtrs Depth .09 Mtrs Physical Volume .01 M3 Weight 3.24 Kgs

TEL Act 8 Part Dev 3-1 Exhaust Assembly To Facilities

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Dev 3-1 Exhaust Assembly To Facilities for Tel Act 8 Height .09 Mtrs Width .96 Mtrs Depth .09 Mtrs Physical Volume .01 M3 Weight 4.12 Kgs

TEL Act 8 Part PRA θ Fans

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part PRA θ Fans for Tel Act 8 Part Name DC Mini Ace 25 (Brushless) Fan Height .12 Mtrs Width .12 Mtrs Depth .04 Mtrs Physical Volume .00 M3 Weight .29 Kgs 4 x Fans

TEL Act 8 Part Developer Block Rear Utilities Panel

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Developer Block Rear Utilities Panel for Tel Act 8 Height .24 Mtrs Width .83 Mtrs Depth .21 Mtrs Physical Volume .04 M3 Weight 10.50 Kgs All Gauges & Regulators Present. 2 PCW 1/4 Turn Valves Mis...